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Advances in Condensed Matter Physics
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Advances in Condensed Matter Physics
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2018
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Article
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Fig 1
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Research Article
Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation
Figure 1
(a) Block diagram of PIII setup and (b) the setup modification for W implantation.
(a)
(b)