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Advances in Condensed Matter Physics
Volume 2018, Article ID 9789370, 14 pages
https://doi.org/10.1155/2018/9789370
Research Article

Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation

1Institute of Physics and Technology, Petrozavodsk State University, Petrozavodsk 185910, Russia
2Institute of Geology, Karelian Research Centre, Russian Academy of Sciences, Petrozavodsk 185910, Russia

Correspondence should be addressed to Alexander Pergament; ur.ailerak.usp@grepa

Received 28 October 2017; Accepted 27 December 2017; Published 1 February 2018

Academic Editor: Joseph S. Poon

Copyright © 2018 Sergey Burdyukh et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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