Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation

<table class="fixed-width table-group" id="tab2"><tr><td><table class="table"><colgroup><col style="width:12.48em"/><col style="width:9.54em"/><col style="width:3.01em"/><col style="width:3.34em"/><col style="width:3.39em"/></colgroup><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td class="align_left">Sample</td><td class="align_center">Number in Figure <a href="../fig6/">6</a></td><td class="align_center">2<i>θ</i>, °</td><td class="align_center"><i><i>δ</i></i>, Å</td><td class="align_center"><i>I</i>, cps</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td class="align_left">Initial film</td><td class="align_center"><span style="width: 15.3928ptpx;"><svg height="11.5564pt" id="M66" style="vertical-align:-2.26807pt" version="1.1" viewbox="-0.0498162 -9.28833 15.3928 11.5564" width="15.3928pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path></g><g transform="matrix(.013,0,0,-0.013,4.498,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z" id="g113-50"></path></g><g transform="matrix(.013,0,0,-0.013,10.738,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path></g></svg></span></td><td class="align_center">7.65</td><td class="align_center">11.55</td><td class="align_center">11625</td></tr><tr><td class="align_left">Hydrogenated</td><td class="align_center"><span style="width: 15.3928ptpx;"><svg height="11.5564pt" id="M67" style="vertical-align:-2.26807pt" version="1.1" viewbox="-0.0498162 -9.28833 15.3928 11.5564" width="15.3928pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path></g><g transform="matrix(.013,0,0,-0.013,4.498,0)"><path d="M412 140C382 77 369 73 315 73H129L270 222C362 320 402 379 402 466C402 571 322 635 234 635C177 635 130 609 99 576L42 495L64 475C90 514 133 568 201 568C274 568 318 519 318 435C318 349 255 267 193 193C144 135 87 78 32 23V0H405C417 45 427 89 440 131L412 140Z" id="g113-51"></path></g><g transform="matrix(.013,0,0,-0.013,10.738,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path></g></svg></span></td><td class="align_center">8.80</td><td class="align_center">10.04</td><td class="align_center">6805</td></tr><tr><td class="align_left">1 day after hydrogenation</td><td class="align_center"><span style="width: 15.3928ptpx;"><svg height="11.5564pt" id="M68" style="vertical-align:-2.26807pt" version="1.1" viewbox="-0.0498162 -9.28833 15.3928 11.5564" width="15.3928pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path></g><g transform="matrix(.013,0,0,-0.013,4.498,0)"><path d="M285 378C315 398 338 416 353 432C373 451 384 474 384 503C384 579 325 635 236 635H235C182 635 136 610 108 579L65 516L85 496C110 533 150 575 205 575C258 575 300 543 300 481C300 407 232 369 141 339L147 310C163 315 188 321 211 321C268 321 338 284 338 192C338 94 288 40 217 40C160 40 119 68 93 91C85 98 77 97 69 91C60 84 47 71 46 58C44 46 48 35 62 22C75 10 116 -12 162 -12C234 -12 424 62 424 224C424 297 373 359 285 376V378Z" id="g113-52"></path></g><g transform="matrix(.013,0,0,-0.013,10.738,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path></g></svg></span></td><td class="align_center">8.68</td><td class="align_center">10.17</td><td class="align_center">6850</td></tr><tr><td class="align_left">1 week after hydrogenation</td><td class="align_center"><span style="width: 15.3928ptpx;"><svg height="11.5564pt" id="M69" style="vertical-align:-2.26807pt" version="1.1" viewbox="-0.0498162 -9.28833 15.3928 11.5564" width="15.3928pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path></g><g transform="matrix(.013,0,0,-0.013,4.498,0)"><path d="M456 178V225H360V632H320C217 496 115 347 20 206V178H280V106C280 40 276 34 189 27V0H445V27C364 34 360 39 360 106V178H456ZM280 225H82C149 335 214 431 278 520H280V225Z" id="g113-53"></path></g><g transform="matrix(.013,0,0,-0.013,10.738,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path></g></svg></span></td><td class="align_center">8.10</td><td class="align_center">10.91</td><td class="align_center">7744</td></tr><tr><td class="align_left">2 weeks after hydrogenation</td><td class="align_center"><span style="width: 15.3928ptpx;"><svg height="11.5564pt" id="M70" style="vertical-align:-2.26807pt" version="1.1" viewbox="-0.0498162 -9.28833 15.3928 11.5564" width="15.3928pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path></g><g transform="matrix(.013,0,0,-0.013,4.498,0)"><path d="M153 550H386L412 615L406 623H120L82 318C104 327 142 338 184 338C294 338 347 275 347 187C347 112 305 39 221 39C160 39 119 71 97 89C88 97 80 96 71 90C59 80 50 67 49 57C48 45 52 36 66 23C80 9 123 -12 169 -12C221 -11 288 15 342 59C403 109 431 165 431 225C431 308 366 395 238 395C212 395 165 379 127 364L153 550Z" id="g113-54"></path></g><g transform="matrix(.013,0,0,-0.013,10.738,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path></g></svg></span></td><td class="align_center">7.47</td><td class="align_center">11.82</td><td class="align_center">11082</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Interlayer spacing (<svg height="9.49473pt" id="M65" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 6.84582 9.49473" width="6.84582pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M494 514C482 587 419 712 303 712C238 712 174 667 174 603C174 561 205 514 249 449C219 438 187 422 162 407C93 366 23 283 23 177C23 69 87 -12 190 -12C244 -12 288 5 328 33C406 87 444 170 444 249C444 329 404 391 331 475C265 550 222 605 222 627C222 647 238 657 267 657C355 657 421 585 484 499L494 514ZM359 234C359 143 319 30 219 30C172 30 114 75 114 178C114 275 163 343 195 378C212 397 241 415 269 425C305 382 359 313 359 234Z" id="g113-226"></path></g></svg>) calculated from the XRD data for the as-prepared, hydrogenated, and aged V<sub>2</sub>O<sub>5</sub> xerogel films.</div>

Advances in Condensed Matter Physics

tab2

Table 2

Table 2: Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation 