Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_left">Parameters</td><td class="align_center">Values</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left">Growth temperature (<sup>o</sup>C)</td><td class="align_center">350</td></tr><tr><td class="align_left">Growth time (min)</td><td class="align_center">30</td></tr><tr><td class="align_left">Carrier gas flow rate (L/min)</td><td class="align_center">5</td></tr><tr><td class="align_left">Ultrasonic transducer power (W)</td><td class="align_center">8</td></tr><tr><td class="align_left">Precursor molarity (M)</td><td class="align_center">0.05</td></tr><tr><td class="align_left">Quartz reactor diameter (inch)</td><td class="align_center">2</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Mist-CVD deposition parameters for ZnO thin films.</div>

Advances in Condensed Matter Physics

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Table 1

Table 1: Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma 

Table 1 | Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma 