Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td class="align_left">Samples</td><td class="align_center">Δ<i>θ</i> (degree)</td><td class="align_center">Δ<i>ω</i> (cm<sup>−1</sup>)</td><td class="align_center">Strain (<i>ε</i><sub>zz</sub>)</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td class="align_left">A</td><td class="align_center">0.22</td><td class="align_center">9.8</td><td class="align_center">−0.0045</td></tr><tr><td class="align_left">B</td><td class="align_center">0.12</td><td class="align_center">2.8</td><td class="align_center">−0.0012</td></tr><tr><td class="align_left">C</td><td class="align_center">0.08</td><td class="align_center">0.8</td><td class="align_center">−0.0006</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>The peak shifts of Raman and XRD peaks and calculated strain values of ZnO thin films.</div>

Advances in Condensed Matter Physics

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Table 3

Table 3: Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma 

Table 3 | Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma 