Research Article

AlGaN/GaN Heterostructure Schottky Barrier Diodes with Graded Barrier Layer

Figure 2

Schematic illustration of (a) conventional and (b) recessed ring SBDs. (c) Optical microscope photograph of ring SBDs. (d) Schematic illustration of the SBD with air-bridge structure. (e) The SEM image of the SBD with air-bridge structure.