Nanobeams and AFM Subject to Piezoelectric and Surface Scale Effects

Table 1

Parameters of piezoelectric multispan beam.

Parameter	Numeric Value	Unity
Length		m
Length		m
Length		m
Width		m
Width		m
Width		m
Thickness		m
Thickness		m
Density	2330
Density	6390
Young’s modulus	105
Young’s modulus	104