Nanobeams and AFM Subject to Piezoelectric and Surface Scale Effects

Table 3

Comparison between natural frequencies of Timoshenko beam models including and not including surface effects, considering nano- and microscale, of a Silicon beam. Nanobeam geometric parameters: , , and . Microbeam geometric parameters: , , and .

		Nano				Micro
BC	Model	Natural frequencies (GHz)				Natural frequencies (MHz)
S-S	TMB	7.0808	25.063	51.327	82.922	7.1996	27.010	55.669	89.756
	TB	7.1998	27.012	55.673	89.763	7.1998	27.012	55.673	89.763
	TMB [13]	7.08	25.07	51.33	82.92	-	-	-	-
	TB [13]	7.20	27.02	55.70	89.76	-	-	-	-
C	TMB	3.0168	14.674	36.484	64.514	2.5976	15.273	39.297	69.725
	TB	2.597	15.273	39.300	69.730	2.5971	15.273	39.300	69.730
	TMB [13]	3.02	14.67	36.38	64.46	-	-	-	-
	TB [13]	2.60	15.28	39.31	69.74	-	-	-	-