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Advances in OptoElectronics
Volume 2008, Article ID 485467, 10 pages
http://dx.doi.org/10.1155/2008/485467
Research Article

PECVD-ONO: A New Deposited Firing Stable Rear Surface Passivation Layer System for Crystalline Silicon Solar Cells

1Fraunhofer Institute for Solar Energy Systems, Heidenhofstrasse 2, 79110 Freiburg, Germany
2Forschungszentrum Dresden-Rossendorf, Bautzner Landstrasse 128, 01328 Dresden, Germany

Received 17 January 2008; Accepted 6 March 2008

Academic Editor: Armin Aberle

Copyright © 2008 M. Hofmann et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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