Advances in Evaporated Solid-Phase-Crystallized Poly-Si Thin-Film Solar Cells on Glass (EVA)
Figure 2
(a) Schematic of the
self-aligned scheme for emitter groove metallization after blanket Al
evaporation (the SiN layer is not displayed); (b) FIB image of an emitter
groove after completed self-aligned emitter groove metallization. The inset on the bottom right is a close-up
of the contact region between the evaporated Al layer and the poly-Si film.
