Research Article
Advances in Evaporated Solid-Phase-Crystallized Poly-Si Thin-Film Solar Cells on Glass (EVA)
Table 1
Typical design parameters
of EVA solar cells in superstrate configuration (i.e., with glass-side emitter
and air-side BSF).
| | Parameter | Details |
| | Glass | 3.3 mm, borosilicate, planar or textured | | AR
coating | ~70 nm PECVD deposited SiN, | | Emitter | ~100 nm, or ,
~200–400 Ω/sq | | Base | ~1.8 m, or
, | | SPC | ≥24 h at C | | BSF | ~100 nm, or ,
~500–1000 Ω/sq | | RTA | 4 min at C | | Hydrogenation | 15–20 min at C, remote plasma |
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