Table 1: Typical design parameters of EVA solar cells in superstrate configuration (i.e., with glass-side emitter and air-side BSF).

Parameter Details

Glass3.3 mm, borosilicate, planar or textured
AR coating~70 nm PECVD deposited SiN,
Emitter~100 nm, or , ~200–400 Ω/sq
Base~1.8  m, or ,
SPC≥24 h at C
BSF~100 nm, or , ~500–1000 Ω/sq
RTA4 min at C
Hydrogenation15–20 min at C, remote plasma