Tensorial Model for Photolithography Aerial Image Simulation

Table 1

Some numerical values corresponding with Figure 3.

Matrix size	120	720	1320	1920	2520	3000
SVD runtime (sec)	0.109	6.262	38.911	122.810	279.762	489.808
Fixed point runtime (sec)	0.010	0.406	1.762	4.536	9.220	14.522
SVD/FP rate	10.629	15.441	22.083	27.073	30.343	33.728