From Spheric to Aspheric Solid Polymer Lenses: A Review
Figure 8
(a) Optical microscope and (b) AFM measurements after FC-77 thinner has been applied to a structural surface. FC-77 (3 M, USA) was originally used as a Teflon thinner at a concentration of 1%. The Teflon was spun-coated on a chip with a predefined photoresist pattern and dry-baked at 120°C for 10 min. However, because the saturated vapor pressure of the FC-77 thinner was relatively high (42 torr) [17], it volatilized too rapidly during spin coating which resulted in a wrinkled surface.
