Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope

<table>Construction of <svg height="7.1374998" id="M16" style="vertical-align:-0.10033pt" version="1.1" viewbox="0 0 7.8874998 7.1374998" width="7.8874998" xmlns="http://www.w3.org/2000/svg">
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</svg>-well <svg height="9.875" id="M17" style="vertical-align:-2.29482pt" version="1.1" viewbox="0 0 7.7624998 9.875" width="7.7624998" xmlns="http://www.w3.org/2000/svg">
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<tspan style="font-size: 12.50px; " x="0" y="0">𝑝</tspan>
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Advances in OptoElectronics

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Figure 2

Figure 2: Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope 