Microcavity Silicon Photodetectors at 1.55 μm

<table>Measured responsivity versus wavelength for two realized devices: having bottom mirror reflectivity  (<svg height="14.2375" id="M82" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 29.3375 14.2375" width="29.3375" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.2375)">
<g transform="translate(72,-60.61)">
<text transform="matrix(1,0,0,-1,-71.95,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑅</tspan>
</text>
<text transform="matrix(1,0,0,-1,-62.7,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">B</tspan>
<tspan style="font-size: 8.75px; " x="5.837584" y="0">M</tspan>
</text>
</g>
</g>
</svg>) of 0.3 (blue solid line) and 0.99 (black dashed line), respectively.</table>

Advances in OptoElectronics

Microcavity Silicon Photodetectors at 1.55 μm

Figure 12