Deposition and Characterization of CVD-Grown Ge-Sb Thin Film Device for Phase-Change Memory Application

<table>(a) A diagram of the Ge-Sb thin film phase-change memory device fabricated in this work, (b) SEM image of the fabricated Ge-Sb thin film device, (c) setup for electrical characterization of Ge-Sb thin film device.</table>

Advances in OptoElectronics

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Figure 2

Figure 2: Deposition and Characterization of CVD-Grown Ge-Sb Thin Film Device for Phase-Change Memory Application 