Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities
Figure 2
Measured and fitted XRR profile at Cu Kα wavelength (λ = 1.54 Å) for Mo/Si MLs with and with different periodicity. d = 90 Å for ML-1 and d = 66 Å for ML-2. The best fit results are given in Table 2.
