Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities
Table 2
Thickness and roughness of the various layers of Mo/Si MLs deduced from the fit of XRR results of Figures 2 and 3. IL1stands for interlayer at the Mo-on-Si interface, IL2 stands for interlayer at the Si-on-Mo interface. is the unit decrement of real part of the refractive index.