New Alumina Substrates for Microelectronics

Niwa, K.; Murakawa, K.

doi:https://doi.org/10.1155/APEC.2.115

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Volume 2 | Article ID 130418 | https://doi.org/10.1155/APEC.2.115

New Alumina Substrates for Microelectronics

K. Niwa¹and K. Murakawa¹

Received19 Oct 1974

Accepted25 Feb 1975

Abstract

Alumina substrates of Al₂O₃–MgO–Cr₂O₃ give excellent surface smoothness. These were studied with respect to their green tapes, the surface finish of fired substrates, and in particular smoothness. The factors contributing to these characteristics were investigated, in particular the effect of the addition of Cr₂O₃ on surface smoothness.

Copyright

Copyright © 1975 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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