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ElectroComponent Science and Technology
Volume 6, Issue 1, Pages 9-12
http://dx.doi.org/10.1155/APEC.6.9

Model for Describing Emission Characteristics of Electron-Beam Evaporation Sources

Department of Electronics Technology, Technical University of Budapest, Budapest H-1521, Hungary

Received 12 July 1978

Copyright © 1979 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The experimental data for the anistropic component of the angular distribution of electron-beam evaporation sources are usually described in terms of the cosnθ dependence. In this paper a simple model for calculating angular distributions is presented. The generally used dependence appears as a particular case in the model.