Abstract

The paper describes the design of a low cost diffusion furnace suitable for monolythic circuit manufacture in educational and other establishments, where throughput is small. Features include maximum temperature of 1300℃, direct reading set temperature dial, flat zone 55 mm and an idle temperature of 420℃ when the furnace is not in use.Four such furnaces have been in operation at the School of Electronic Engineering, South Australian Institute of Technology, each for a twelve month period and have given trouble free operation.