Active and Passive Electronic Components

Active and Passive Electronic Components / 1985 / Article

Open Access

Volume 11 |Article ID 865124 | https://doi.org/10.1155/APEC.11.271

Grazyna Beensh-Marchwicka, Lubomila Krol-Stepniewska, "Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering", Active and Passive Electronic Components, vol. 11, Article ID 865124, 10 pages, 1985. https://doi.org/10.1155/APEC.11.271

Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering

Received25 Oct 1982
Accepted18 Oct 1983

Abstract

The preparation of tin dioxide films by low energy reactive sputtering of tin and tin-antimony (1-10% wt. Sb) in an oxygen – argon atmosphere is described. The dependences of oxygen content in the range from 0 to 50%, target compositions, substrate temperature of 300 K-573 K on minimum resistivity at satisfactory transmittance and on reproducibility are discussed. The correlation between the electrical and optical properties and the microstructure of the films is shown.

Copyright © 1985 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


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