Grazyna Beensh-Marchwicka, Lubomila Krol-Stepniewska, "Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering", Active and Passive Electronic Components, vol. 11, Article ID 865124, 10 pages, 1985. https://doi.org/10.1155/APEC.11.271
Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering
The preparation of tin dioxide films by low energy reactive sputtering of tin and tin-antimony (1-10% wt. Sb) in an oxygen – argon atmosphere is described. The dependences of oxygen content in the range from 0 to 50%, target compositions, substrate temperature of 300 K-573 K on minimum resistivity at satisfactory transmittance and on reproducibility are discussed. The correlation between the electrical and optical properties and the microstructure of the films is shown.
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