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Active and Passive Electronic Components
Volume 12, Issue 3, Pages 155-166

Control of Electrical Properties of RuO2 Thick Film Resistors

1Shoei Chemical lnc. 1-1, Nishi-Shinjuku 2-Chome, Shinjuku-Ku, Tokyo, Japan
2Physical Science Laboratotqes, Nihon University 1-2-1, lzumicho, Chiba Pref., Narashino-City, Japan

Received 10 October 1985; Accepted 12 December 1985

Copyright © 1987 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Oxides of various elements have been added to RuO2 thick film resistors and the electrical properties of the resultant resistors have been examined.

It is found that almost all the oxides of transition metals, rare earths, and antimony used as additivies can closely control the resistivity and TCR of the resistors to obtain a required value. In addition, it is found that the principle of superposition applies to the additives.