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Active and Passive Electronic Components
Volume 14, Issue 3, Pages 111-118
http://dx.doi.org/10.1155/1991/85965

Optical and Electrical Properties of SnO2:F Thin Films Obtained by R.F. Sputtering With Various Targets

1Laboratoire de Chimie du Solide du CNRS, 351 cours de la Libération, Talence, 33405 , France
2Laboratoire d’étude des Matériaux pour la Microélectronique, Université de Bordeaux I, Talence, 33405, France

Received 10 July 1990; Accepted 9 August 1990

Copyright © 1991 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

C. Geoffroy, G. Campet, F. Menil, J. Portier, J. Salardenne, and G. Couturier, “Optical and Electrical Properties of SnO2:F Thin Films Obtained by R.F. Sputtering With Various Targets,” Active and Passive Electronic Components, vol. 14, no. 3, pp. 111-118, 1991. https://doi.org/10.1155/1991/85965.