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Active and Passive Electronic Components
Volume 15 (1993), Issue 3-4, Pages 139-146

High-Tc Superconducting YBa2Cu3O7-δ Films and YBa2Cu3O7-δ/PrBa2Cu3O7-δ Superlattices Deposited by Laser Ablation

Microelectronics and Material Physics Laboratories, University of Oulu, Oulu SF-90570, Finland

Received 15 November 1992; Accepted 16 December 1992

Copyright © 1993 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


High Tc superconducting YBa2Cu3O7-d thin films and YBa2Cu37-δ/PrBa2Cu3O7-δ superlattices with various periods and layer thicknesses were deposited by laser ablation on SrTiO3 (100) single crystal substrates using an XeCl excimer laser (λ = 308 nm). The structure of the films was studied by SEM/EDS and X-ray diffraction. The films and superlattices deposited in an in situ process were epitaxial with the c-axis perpendicular to the substrate surface and the a- and b-axes parallel with the SrTiO3 [100] or [010] directions. The electrical properties were studied by measuring the current-voltage characteristics, resistivity and critical current. For the in situ deposited YBa2Cu3O7-d films the zero resistivity temperature was 87 to 90 K and the critical current at 77 K was above 2 × 106 A/cm2. For the films deposited at room temperature and post annealed under in situ deposition conditions, the critical temperature was the same, but the critical current was 0.5 × 106 A/cm2.