Diode Parameter Determination Applied to LDD-MOSFETs for Device
Characterization
M. De La Bardonnie,1P. Mialhe,1E. Bendada,1E. Blampain,2A. Hoffmann,2and J.-P. Charles2
Received17 Apr 1997
Accepted22 Jul 1997
Abstract
The electrical properties of the drain-substrate diode of MOSFETs are shown to be
related to the device geometrical structure. The two dimensional analysis takes into
account the edge effects of the length and width of the gate. Intrinsic parameters are
extracted from current-voltage characteristics and obtained dependent on these
dimensions.