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Volume 2008, Article ID 905628, 9 pages
Research Article

The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

Department of Electrical Engineering, National Penghu University, Penghu 880, Taiwan

Received 22 October 2008; Accepted 21 December 2008

Academic Editor: Yalin Lu

Copyright © 2008 Ming-Hung Hsu. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-𝜃 integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations. Nonlinear equation difficulties are overcome by using the differential quadrature method. The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated.