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Active and Passive Electronic Components
Volume 2011 (2011), Article ID 546986, 6 pages
Research Article

Static and Motional Feedthrough Capacitance of Flexural Microresonator

Department of Electrical Engineering, National University of Kaohsiung, Kaohsiung 81148, Taiwan

Received 16 June 2011; Accepted 8 August 2011

Academic Editor: Ching Liang Dai

Copyright © 2011 Wen-Teng Chang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The present paper evaluates the static and motional feedthrough capacitance of a silicon carbide-based flexural-mode microelectromechanical system resonator. The static feedthrough capacitance was measured by a network analyzer under atmospheric pressure. The motional feedthrough was obtained by introducing various values into the modeling circuit in order to fit the Bode plots measured under reduced pressure. The static feedthrough capacitance was 0.02 pF, whereas the motional feedthrough capacitance of an identical device was about 0.2 pF, which is one order of magnitude larger than the static feedthrough capacitance.