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Active and Passive Electronic Components
Volume 2011 (2011), Article ID 546986, 6 pages
Research Article

Static and Motional Feedthrough Capacitance of Flexural Microresonator

Department of Electrical Engineering, National University of Kaohsiung, Kaohsiung 81148, Taiwan

Received 16 June 2011; Accepted 8 August 2011

Academic Editor: Ching Liang Dai

Copyright © 2011 Wen-Teng Chang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Wen-Teng Chang, “Static and Motional Feedthrough Capacitance of Flexural Microresonator,” Active and Passive Electronic Components, vol. 2011, Article ID 546986, 6 pages, 2011. doi:10.1155/2011/546986