Static and Motional Feedthrough Capacitance of Flexural Microresonator

Table 1

Key parameters for the folded beam resonator used in determining motional components.

Parameters
M: effective mass (kg)	9.74×10^−11
k: spring constant (N/m)	7.81
𝑉𝑝: bias voltage (V)	30
∂C/∂x: capacitance change of displacement (F/m)	2.30×10^−10
f: resonant frequency (Hz)	45081
Q: quality factor	10392