Static and Motional Feedthrough Capacitance of Flexural Microresonator

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td align="center">Motional components</td><td align="center"></td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td align="center"><svg height="14.325" id="M46" style="vertical-align:-3.20526pt" version="1.1" viewbox="0 0 20.075001 14.325" width="20.075001" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.325)">
<g transform="translate(72,-60.54)">
<text transform="matrix(1,0,0,-1,-71.95,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑅</tspan>
</text>
<text transform="matrix(1,0,0,-1,-62.7,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑚</tspan>
</text>
</g>
</g>
</svg>   (kΩ)</td><td align="center">1.54</td></tr><tr><td align="center"><svg height="14.425" id="M47" style="vertical-align:-3.20526pt" version="1.1" viewbox="0 0 19 14.425" width="19" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.425)">
<g transform="translate(72,-60.46)">
<text transform="matrix(1,0,0,-1,-71.95,63.71)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝐶</tspan>
</text>
<text transform="matrix(1,0,0,-1,-63.56,60.58)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑚</tspan>
</text>
</g>
</g>
</svg>  (aF)</td><td align="center">6.09</td></tr><tr><td align="center"><svg height="14.325" id="M48" style="vertical-align:-3.20526pt" version="1.1" viewbox="0 0 19.575001 14.325" width="19.575001" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.325)">
<g transform="translate(72,-60.54)">
<text transform="matrix(1,0,0,-1,-71.95,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝐿</tspan>
</text>
<text transform="matrix(1,0,0,-1,-63.1,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑚</tspan>
</text>
</g>
</g>
</svg> (MH)</td><td align="center">2.05</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Equivalent motional resistance (<svg height="14.325" id="M43" style="vertical-align:-3.20526pt" version="1.1" viewbox="0 0 20.075001 14.325" width="20.075001" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.325)">
<g transform="translate(72,-60.54)">
<text transform="matrix(1,0,0,-1,-71.95,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑅</tspan>
</text>
<text transform="matrix(1,0,0,-1,-62.7,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑚</tspan>
</text>
</g>
</g>
</svg>), capacitance (<svg height="14.425" id="M44" style="vertical-align:-3.20526pt" version="1.1" viewbox="0 0 19 14.425" width="19" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.425)">
<g transform="translate(72,-60.46)">
<text transform="matrix(1,0,0,-1,-71.95,63.71)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝐶</tspan>
</text>
<text transform="matrix(1,0,0,-1,-63.56,60.58)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑚</tspan>
</text>
</g>
</g>
</svg>), and inductance (<svg height="14.325" id="M45" style="vertical-align:-3.20526pt" version="1.1" viewbox="0 0 19.575001 14.325" width="19.575001" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.325)">
<g transform="translate(72,-60.54)">
<text transform="matrix(1,0,0,-1,-71.95,63.79)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝐿</tspan>
</text>
<text transform="matrix(1,0,0,-1,-63.1,60.66)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑚</tspan>
</text>
</g>
</g>
</svg>) of the resonator.

Active and Passive Electronic Components

tab2

Table 2

Table 2: Static and Motional Feedthrough Capacitance of Flexural Microresonator 