Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="834961.fig.001a" src="https://static.hindawi.com/articles/apec/volume-2012/834961/figures/834961.fig.001a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Slide view</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="834961.fig.001b" src="https://static.hindawi.com/articles/apec/volume-2012/834961/figures/834961.fig.001b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Top view</td></tr></table></td></tr></table>

<table>Schematic drawing of the sensor.</table>

Active and Passive Electronic Components

fig1

Figure 1

Figure 1: Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor 