Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

<table>Frequency response of the piezoelectric ZnO cantilever sensor (<svg height="15.5375" id="M77" style="vertical-align:-3.276pt" version="1.1" viewbox="0 0 20.325001 15.5375" width="20.325001" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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Active and Passive Electronic Components

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Figure 11

Figure 11: Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor 