Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography

<table>Three-dimensional rendering of a multilayered, stacked inductor (MLSI).</table>

Active and Passive Electronic Components

Figure 1: Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography 