Research Article

Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band

Table 4

Extracted FBAR parameters.

ParameterFilter AFilter B
FBAR typeFBAR 1 (series)FBAR 2 (shunt)FBAR 1 (series)FBAR 2 (shunt)

(pF)0.68720.06140.46810.0901
(pF)0.03500.03790.02390.0258
(nH)2.861334.6164.223.582
(%)6.066.546.066.54
(GHz)15.90414.70715.90414.707
(GHz)16.31315.1216.31315.12