Research Article
Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band
Table 5
Comparisons of 1D and 3D FEM of Filter A.
| Parameters | Series FBAR | Shunt FBAR | 1D | 3D FEM | 1D | 3D FEM |
| (pF) | 0.6872 | 0.6837 | 0.0614 | 0.0651 | (pF) | 0.0351 | 0.0373 | 0.0379 | 0.0357 | (nH) | 2.86 | 2.69 | 34.616 | 32.897 | (%) | 6.06 | 6.36 | 6.54 | 6.51 | (GHz) | 15.90 | 15.87 | 14.70 | 14.67 | (GHz) | 16.30 | 16.30 | 15.10 | 15.12 |
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