Research Article

Design and Fabrication of a PDMS-Based Manual Micro-Valve System for Microfluidic Applications

Figure 2

Fabrication of the SU-8 mold for valve channels. (a) Prepare a SU-8 photoresist layer on a 2-inch silicon wafer; (b) UV-exposure with a transparent mask; (c) a SU-8 master mold obtained after the final step.