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BioMEMS platform | Main components | Fabrication strategy | Mechanism of operation | Specifics | Ref. |
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Microfluidic-based Raman ACS | Laser beam laser tweezer Raman microscopy PDMS-based microfluidic device | Standard soft lithography technique | Raman effect takes place when light illuminates a certain region of the microdevice. The photon interaction perturbs the electron configuration of the molecule to an unstable virtual state during the photon scattering, yielding the differences between particles. | The laser tweezers enable trapping of individual cells at the focus of the laser beam. | [15] |
Micro/nanomotors for cancer cell targeting | Synthesized PS Janus particles | Wet etching and photolithography | The micromotors were designed to harness local H2O2 produced by cancer cells to convert chemical energy into mechanical propulsion while targeting specific cancer cells. | The design needs to overcome the low Reynolds number and Brownian motion, which work together against the motor’s locomotion. | [14] |
Centrifugal microfluidic Chip | Charge-based microchannel flow | Standard soft lithography | By applying a voltage to the cells, monodisperse droplets were generated and manipulated. | The device encapsulates and sorts cells in one single step. | [10] |
Single-molecule tracing microfluidic chip | Microchannels Acoustic wave transducer | Acoustic waves push specific particles into cavities depending on their size and deformability. | The device can be used for organic and inorganic particle separation. | [11] |
3D carbon-DEP microfluidic chip | 3D-carbon electrodes voltage signal generator | Two-step photolithography process | DEP was used to separate death from live monocytes using 3D carbon electrodes. A voltage was applied to create an electric field. Live monocyte cells reacted to the attraction force and were trapped in the electric fields near the electrodes while dead cells remain unresponsive. | The strategy offers a contact-free procedure leading to more accurate analytical results. | [17] |
DEP microfluidic chip | ITO electrodes Function generator Power supply Syringe pump Microfluidic device | Standard soft lithography | Following the channels, the cells were carried to the tumor-trapping zone, where tumor cells could not continue traveling through the device outlet due to their size and deformability. | The device is capable to induce cell sorting based on DEP by encapsulating particles in droplets and applying a voltage potential in a single step. | [18] |
Microfluidic-based Raman ACS optofluidic platform | Raman microspectroscopy Laser beams Laser tweezers PDMS-based microfluidic device | Standard soft lithography | Cells from a sample fluid were flown into a microfluidic device and focused in the vertical and horizontal directions by two sheath flows. Cells captured by the optical tweezers were moved to the sample-free stream for spectrum measurement. Cells of interest were released into the collection outlet for further cultivation. | The device is capable of sorting four model bacteria while demonstrated a sorting accuracy of 98%, high-throughput performance by sorting up to 500 cells per hour, and compatibility with cultivation after collection of the cells. | [16] |
DEP microfluidic chip | Au/Ti electrodes Function generator Power supply Syringe pump PDMS-based microfluidic device | Standard soft lithography, physical vapor deposition, and D.C. sputtering | A sample was injected in the microfluidic chip at a constant rate, following through the channels; the cells of interest were subjected to DEP forces and trapped in different areas. | The device is capable of separating three kinds of circulating cells. The proposed model for DEP-based cell stretching enables the integration of more reliable geometries that can potentially optimize the use of DEP for cell sorting. | [20] |
DEP microfluidic chip with conductive PDMS | Ag-PDMS-based electrodes Power supply PDMS microfluidic chip | Standard soft lithography and multilayer lithography | Sorting was achieved by DEP forces while a solution of cells passed through the microfluidic device. | The device utilizes Ag-PDMS electrodes in a simple fabrication process. DEP is utilized at low DC voltages of less than 15 Vpp with a high frequency. | [19] |
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