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BioMed Research International
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2020
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Article
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Tab 1
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Research Article
[Retracted] The Anatase Phase of Nanotopography Titania with Higher Roughness Has Better Biocompatibility in Osteoblast Cell Morphology and Proliferation
Table 1
Summary of deposition conditions of titania films.
Base pressure
Pa
Working pressures
T3P0V: 3 Pa at a substrate bias of 0 V
T5P0V: 5 Pa at a substrate bias of 0 V
T7P0V: 7 Pa at a substrate bias of 0 V
T5P50V: 5 Pa at a substrate bias of 50 V
T7P50V: 7 Pa at a substrate bias of 50 V
Deposition time
8 hrs for each sample
RF power
150 W
Argon flow rate
30 sccm
Oxygen flow rate
10 sccm
Target to substrate distance
70 mm
Diameter of silicon (100) substrate
25.4 mm
Diameter of the titanium target
60 mm