Research Article

[Retracted] The Anatase Phase of Nanotopography Titania with Higher Roughness Has Better Biocompatibility in Osteoblast Cell Morphology and Proliferation

Table 1

Summary of deposition conditions of titania films.

Base pressure Pa
Working pressuresT3P0V: 3 Pa at a substrate bias of 0 V
T5P0V: 5 Pa at a substrate bias of 0 V
T7P0V: 7 Pa at a substrate bias of 0 V
T5P50V: 5 Pa at a substrate bias of 50 V
T7P50V: 7 Pa at a substrate bias of 50 V
Deposition time8 hrs for each sample
RF power150 W
Argon flow rate30 sccm
Oxygen flow rate10 sccm
Target to substrate distance70 mm
Diameter of silicon (100) substrate25.4 mm
Diameter of the titanium target60 mm