Understanding the Resistive Switching Phenomena of Stacked Al/Al<sub>2</sub>O<sub>3</sub>/Al Thin Films from the Dynamics of Conductive Filaments

<div>Resistive switching for annealed Al/Al<sub>2</sub>O<sub>3</sub> (10 nm)/Al stacked structures. (a) Bipolar mode with CC = 100 mA and (b) unipolar mode with <svg height="12.0621pt" id="M106" style="vertical-align:-3.2957pt" version="1.1" viewbox="-0.0498162 -8.7664 67.1118 12.0621" width="67.1118pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M614 175C564 76 510 21 408 21C256 21 146 149 146 336C146 488 235 629 402 629C510 629 570 586 597 480L626 488C620 541 614 582 606 638C578 643 510 665 429 665C206 665 44 527 44 316C44 157 153 -15 402 -15C474 -15 558 5 586 11C604 45 629 119 643 165L614 175Z" id="g121-65"></path></g><g transform="matrix(.013,0,0,-0.013,8.736,0)"><path d="M614 175C564 76 510 21 408 21C256 21 146 149 146 336C146 488 235 629 402 629C510 629 570 586 597 480L626 488C620 541 614 582 606 638C578 643 510 665 429 665C206 665 44 527 44 316C44 157 153 -15 402 -15C474 -15 558 5 586 11C604 45 629 119 643 165L614 175Z" id="g121-65"></path></g><g transform="matrix(.0091,0,0,-0.0091,17.446,3.132)"><path d="M416 501L399 642C356 655 314 665 271 665C140 665 63 582 63 486C63 372 163 325 229 290C304 250 359 217 359 142C359 70 316 25 240 25C138 25 94 125 78 186L44 178C52 123 64 45 72 21C81 16 96 8 121 0S179 -15 220 -15C353 -15 445 68 445 176C445 289 350 335 270 375C191 414 143 449 143 520C143 572 177 627 253 627C340 627 366 556 382 495L416 501Z" id="g58-81"></path></g><g transform="matrix(.0091,0,0,-0.0091,21.75,3.132)"><path d="M522 166C507 123 488 90 472 71C449 44 419 38 347 38C296 38 261 38 242 51C223 63 217 85 217 132V315H311C398 315 406 310 419 239H453V433H419C406 365 401 358 311 358H217V580C217 609 219 612 251 612H331C400 612 427 604 440 584C453 561 463 541 472 498L506 502C501 558 497 627 497 650H43V618C122 610 130 609 130 520V128C130 46 121 40 30 32V0H521C529 30 552 128 557 162L522 166Z" id="g58-67"></path></g><g transform="matrix(.0091,0,0,-0.0091,27.028,3.132)"><path d="M601 496C596 555 591 627 591 675H567C551 656 544 650 516 650H120C91 650 79 651 64 675H41C38 619 34 555 29 492H63C75 537 83 566 96 582C110 604 128 612 207 612H272V126C272 46 264 38 170 33V0H464V33C368 38 359 48 359 126V612H430C502 612 520 605 535 582C547 566 556 541 567 492L601 496Z" id="g58-82"></path></g><g transform="matrix(.013,0,0,-0.013,36.931,0)"><path d="M535 323V373H52V323H535ZM535 138V188H52V138H535Z" id="g117-34"></path></g><g transform="matrix(.013,0,0,-0.013,48.193,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z" id="g113-50"></path></g><g transform="matrix(.013,0,0,-0.013,54.433,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z" id="g113-49"></path></g><g transform="matrix(.013,0,0,-0.013,60.673,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z" id="g113-49"></path></g></svg> <i>μ</i>A. The <svg height="12.584pt" id="M107" style="vertical-align:-3.29567pt" version="1.1" viewbox="-0.0498162 -9.28833 46.3984 12.584" width="46.3984pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M405 650H141L135 622C222 616 230 610 215 535L133 116C118 41 113 33 29 28L23 0H289L295 28C209 33 205 40 219 116L298 535C312 609 317 616 399 622L405 650Z" id="g113-74"></path></g><g transform="matrix(.0091,0,0,-0.0091,4.719,3.132)"><path d="M387 665C175 665 46 498 46 318C46 123 194 -15 374 -15C558 -15 712 114 712 333C712 535 557 665 387 665ZM364 625C495 625 607 518 607 306C607 115 505 25 396 25C256 25 151 161 151 346C151 532 255 625 364 625Z" id="g58-77"></path></g><g transform="matrix(.0091,0,0,-0.0091,11.544,3.132)"><path d="M502 500C497 551 492 613 491 650H43V617C122 612 130 606 130 521V129C130 45 122 38 41 33V0H319V33C227 38 217 45 217 129V305H319C411 305 413 295 427 225H461V421H427C414 357 411 348 319 348H217V580C217 609 219 612 250 612H330C401 612 423 605 439 578C452 557 458 539 467 496L502 500Z" id="g58-68"></path></g><g transform="matrix(.0091,0,0,-0.0091,16.458,3.132)"><path d="M502 500C497 551 492 613 491 650H43V617C122 612 130 606 130 521V129C130 45 122 38 41 33V0H319V33C227 38 217 45 217 129V305H319C411 305 413 295 427 225H461V421H427C414 357 411 348 319 348H217V580C217 609 219 612 250 612H330C401 612 423 605 439 578C452 557 458 539 467 496L502 500Z" id="g58-68"></path></g><g transform="matrix(.013,0,0,-0.013,21.932,0)"><path d="M368 703H309L44 -163H104L368 703Z" id="g113-48"></path></g><g transform="matrix(.013,0,0,-0.013,27.294,0)"><path d="M405 650H141L135 622C222 616 230 610 215 535L133 116C118 41 113 33 29 28L23 0H289L295 28C209 33 205 40 219 116L298 535C312 609 317 616 399 622L405 650Z" id="g113-74"></path></g><g transform="matrix(.0091,0,0,-0.0091,32.013,3.132)"><path d="M387 665C175 665 46 498 46 318C46 123 194 -15 374 -15C558 -15 712 114 712 333C712 535 557 665 387 665ZM364 625C495 625 607 518 607 306C607 115 505 25 396 25C256 25 151 161 151 346C151 532 255 625 364 625Z" id="g58-77"></path></g><g transform="matrix(.0091,0,0,-0.0091,38.837,3.132)"><path d="M731 650H485V618C556 614 580 601 585 558C588 530 592 485 592 390V153H589L173 650H22V618C69 614 92 606 112 582C131 558 132 555 132 483V266C132 175 129 128 125 96C120 49 95 36 36 33V0H281V33C212 36 188 50 183 98C180 129 177 175 177 266V510H179L603 -9H638V390C638 483 640 530 644 561C649 602 674 615 731 618V650Z" id="g58-76"></path></g></svg> ratio for these structures is 10<sup>4</sup>–10<sup>6</sup> for both operation modes. For the unipolar mode, a decrease in <svg height="11.9316pt" id="M108" style="vertical-align:-3.2957pt" version="1.1" viewbox="-0.0498162 -8.6359 23.3117 11.9316" width="23.3117pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M697 650H468L461 623L492 619C539 613 547 605 518 546C481 471 367 264 278 116H276C239 278 197 500 186 567C180 604 185 613 226 619L252 623L260 650H24L17 623C78 617 92 613 108 533L216 -11H247C365 200 515 462 560 529C616 612 624 615 689 623L697 650Z" id="g113-87"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.332,3.132)"><path d="M416 501L399 642C356 655 314 665 271 665C140 665 63 582 63 486C63 372 163 325 229 290C304 250 359 217 359 142C359 70 316 25 240 25C138 25 94 125 78 186L44 178C52 123 64 45 72 21C81 16 96 8 121 0S179 -15 220 -15C353 -15 445 68 445 176C445 289 350 335 270 375C191 414 143 449 143 520C143 572 177 627 253 627C340 627 366 556 382 495L416 501Z" id="g58-81"></path></g><g transform="matrix(.0091,0,0,-0.0091,11.636,3.132)"><path d="M522 166C507 123 488 90 472 71C449 44 419 38 347 38C296 38 261 38 242 51C223 63 217 85 217 132V315H311C398 315 406 310 419 239H453V433H419C406 365 401 358 311 358H217V580C217 609 219 612 251 612H331C400 612 427 604 440 584C453 561 463 541 472 498L506 502C501 558 497 627 497 650H43V618C122 610 130 609 130 520V128C130 46 121 40 30 32V0H521C529 30 552 128 557 162L522 166Z" id="g58-67"></path></g><g transform="matrix(.0091,0,0,-0.0091,16.914,3.132)"><path d="M601 496C596 555 591 627 591 675H567C551 656 544 650 516 650H120C91 650 79 651 64 675H41C38 619 34 555 29 492H63C75 537 83 566 96 582C110 604 128 612 207 612H272V126C272 46 264 38 170 33V0H464V33C368 38 359 48 359 126V612H430C502 612 520 605 535 582C547 566 556 541 567 492L601 496Z" id="g58-82"></path></g></svg> is observed during continuous resistive switching.</div>

Complexity

fig6

Figure 6

Figure 6: Understanding the Resistive Switching Phenomena of Stacked Al/Al<sub>2</sub>O<sub>3</sub>/Al Thin Films from the Dynamics of Conductive Filaments 

Complexity

Understanding the Resistive Switching Phenomena of Stacked Al/Al2O3/Al Thin Films from the Dynamics of Conductive Filaments

Figure 6

Understanding the Resistive Switching Phenomena of Stacked Al/Al₂O₃/Al Thin Films from the Dynamics of Conductive Filaments