Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.008a.svgz" name="4948368.fig.008a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Comparison between AFS and AFS-IS as reference input</td></tr><tr class="fig-image" id="b"><td><object data="https://static.hindawi.com/articles/complexity/volume-2018/4948368/figures/4948368.fig.008b.svgz" name="4948368.fig.008b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Comparison between S-curve-IS and AFS-IS as reference input</td></tr></table>

<div>Input shaper combined with S-curve and AFS-curve as the motion profile.</div>

Complexity

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Figure 8

Figure 8: Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage 