Model-Based ILC with a Modified <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-2.838901pt" id="M1" height="14.2383pt" version="1.1" viewBox="-0.0657574 -11.3994 12.5675 14.2383" width="12.5675pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-82" d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"/></g></svg>-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage

<div>Wafer stage.① short-stroke module; ② long-stroke module.</div>

Complexity

fig2

Figure 2

Figure 2: Model-Based ILC with a Modified <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-2.838901pt" id="M1" height="14.2383pt" version="1.1" viewBox="-0.0657574 -11.3994 12.5675 14.2383" width="12.5675pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-82" d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"/></g></svg>-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage 

Figure 2 | Model-Based ILC with a Modified -Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage 