Review Article
Dynamic Characteristics of Microring Driven by the Symmetrically Distributed Electrostatic Force
Table 1
Material parameters and geometric parameters.
| Properties | value |
| Density | ρ = 2.7 × 103 Kg/m3 | Young’s modulus | E = 6.8 × 1010 Pa | Mean radius | r = 0.02 m | Radial thickness | h = 3 × 10−4m | Gap | = 6 × 10−5m | Width | b = 5 × 10−3m |
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