Dynamic Characteristics of Microring Driven by the Symmetrically Distributed Electrostatic Force

Table 1

Material parameters and geometric parameters.

Properties	value
Density	ρ = 2.7 × 10^3 Kg/m^3
Young’s modulus	E = 6.8 × 10^10 Pa
Mean radius	r = 0.02 m
Radial thickness	h = 3 × 10^−4m
Gap	= 6 × 10^−5m
Width	b = 5 × 10^−3m