Research Article

SPA-Based Modified Local Reachability Density Ratio wSVDD for Nonlinear Multimode Process Monitoring

Table 3

MAR for all test conditions on TE process.

FaultMode 1Mode 3
KPCASVDDLDR-SVDDSmLRDR-SVDDKPCASVDDLDR-SVDDSmLRDR-SVDD
T2SPET2SPE

10.95130.0050.00250.002500.99250.01380.00880.00750.005
20.87250.00750.0050.00250.00130.90830.270.03880.00750.0363
40.98630.97130000.98380.875000
50.98630.97750.9650.90630.93130.97750.99750.08380.03250.0025
60.98540.57730000.98770.5802000
70.98380.93380000.97630.8825000
80.630.01880.01750.01750.01120.5650.01630.01630.0150.01
100.96630.960.83380.53330.44130.95880.78630.5650.28750.105
110.940.53720.16250.01500.94750.72130.2350.0150
120.95880.81130.63630.48880.26880.60750.02130.01750.00750.0025
130.46630.02380.02250.02250.02130.46750.070.05870.02620.0112
140.98750.95380.70750.106200.9850.87250.60380.00750