Research Article

SPA-Based Modified Local Reachability Density Ratio wSVDD for Nonlinear Multimode Process Monitoring

Table 4

FAR for all test conditions on TE process.

FaultMode 1Mode 3
KPCASVDDLDR-SVDDSmLRDR-SVDDKPCASVDDLDR-SVDDSmLRDR-SVDD
T2SPET2SPE

10.030.020.010.020.010.010.0250.010.0250.01
20.030.010.0050.0150.0050.0150.0250.0050.020.015
40.020.0150.0050.0150.010.010.0250.0050.020.01
50.020.0150.010.010.010.020.050.050.0150.015
60.010.0150.0050.010.010.0150.050.0050.020.02
70.020.020.0050.010.010.020.0550.0050.020.02
80.0250.0150.010.020.0050.0150.050.010.0250.015
100.0250.020.0050.020.0050.0150.040.0050.0250.01
110.020.010.0050.0150.0050.010.040.0050.030.015
120.020.0150.0050.0150.0050.020.040.010.0250.01
130.020.0150.0050.020.010.010.0650.0050.0250.01
140.020.010.010.020.0050.010.070.010.030.01