Hierarchical Factor Analysis Methodology for Intelligent Manufacturing

Table 2

Target process, process, and equipment parameters.

Process 1	Control variable	Process 2	Control variable	Process 3	Process parameter
Plating	Temp1 Temp2	Etching	Temp 1 Temp 2	Measurement	Thickness
	Voltage 1 Voltage 2		Speed pressure		Width
	Current 1		Current 1		Space
	Current 2		Current 2
	Flux 1		Concentration