Research Article
Hierarchical Factor Analysis Methodology for Intelligent Manufacturing
Table 5
Summary of the target model.
| Variable | Target | y1 (width) | y2 (thickness) | y3 (space) |
| Data set | Lot size | 137 | 200 | 137 | 200 | 137 | 200 | Variable | 200 | 57 | 200 | 57 | 200 | 57 | Training validation | 70 : 30 | 70 : 30 | 70 : 30 | 70 : 30 | 70 : 30 | 70 : 30 |
| Variable | Pump flux | .Pump5, 6, 12_flux | .Pump1_flux | .c_temp_003 .a_col 143 | .Pump6_flux | .Pump12_flux | .Pump1_flux | Rectifier voltage | .Rect119, 124, 149, 62, 86_vtg | .Rect27_vtg .Rect36_vtg | .Rect124_vtg .Rect125_vtg .Rect150_vtg | .Rect13_vtg .Rect45_vtg | .Rect124_vtg .Rect135_vtg | .Rect1, 20, 27, 36 .Rect3 |
| Coefficient of determination | R-square | 0.83 | 0.36 | 0.76 | 0.29 | 0.52 | 0.41 |
| Validation (training: validation) | RMSE | 1.22 : 1.28 | 0.90 : 0.91 | 0.87 : 1.04 | 0.84 : 0.76 | 0.93 : 1.0 | 0.90 : 1.08 | SSE | 130.9 : 65.5 | 111.5 : 49.9 | 68.8 : 43.6 | 95 : 34.7 | 80.1 : 40.6 | 107.2 : 70.1 |
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