Analysis and Control on a Specific Electromagnetic Micromirror

Figure 2

Ten resonant modes of electromagnetic micromirror. (a) Mode 1. (b) Mode 2. (c) Mode 3. (d) Mode 4. (e) Mode 5. (f) Mode 6. (g) Mode 7. (h) Mode 8. (i) Mode 9. (j) Mode 10.

(a)

(b)

(c)

(d)

(e)

(f)

(g)

(h)

(i)

(j)