Research Article

Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 3

Reactions involving nitrogen species considered in the N2O plasma kinetic system.

No.ProcessDescriptionRatePoBE

Electron collisions (rates in cm3 s−1)
1 N2 + e + 2e N2 ionization *
2 N2 + e 2N + e N2 dissociation *
3 N + e N+ + 2e N ionization *
4 N2  ( ) + e N2  ( ) + e N2 vib. exc. (0-1) *
5 N2  ( ) + e N2  ( ) + e N2 vib. exc. (0–2) *
6 N2  ( ) + e N2  ( ) + e N2 vib. exc. (0–3) *
7 N2  ( ) + e N2  ( ) + e N2 vib. exc. (0–4) *
8 N2  ( ) + e N2  ( ) + e N2 vib. exc. (0–5) *
9 N2  ( ) + e N2  ( ) + e N2 vib. deexc. (1-0)
10 N2  ( ) + e N2  ( ) + e N2 vib. deexc. (2–0)
11 N2  ( ) + e N2  ( ) + e N2 vib. deexc. (3–0)
12 N2  ( ) + e N2  ( ) + e N2 vib. deexc. (4–0)
13 N2  ( ) + e N2  ( ) + e N2 vib. deexc. (5–0)
14 N2  ( ) + e + 2e N2 ionization from ( )
15 N2  ( ) + e + 2e N2 ionization from ( )
16 N2  ( ) + e + 2e N2 ionization from ( )
17 N2  ( ) + e + 2e N2 ionization from ( )
18 N2  ( ) + e + 2e N2 ionization from ( )
19 N2  ( ) + e 2N + e N2 diss. from ( )
20 N2  ( ) + e 2N + e N2 diss. from ( )
21 N2  ( ) + e 2N + e N2 diss. from ( )
22 N2  ( ) + e 2N + e N2 diss. from ( )
23 N2  ( ) + e 2N + e N2 diss. from ( )

Reactions on the wall (rates in s−1)
24      N2 recombination on the wall
25 N (1/2)N2 N2 formation on the wall
26 N+   N N+ recombination on the wall
27 N2  ( )   N2 ( ) N2  ( ) deexcitation on the wall